Innovative five guns EB-PVD technique for perovskite nanostructured thin
films deposition
C.F.Rusti
1
, A.A. Sobetkii
1
, R.M.Piticescu
1
, C. Bogdanescu
1
, A.I. Tudor
1
, A.M. Motoc
1
,
R.R. Piticescu
1
, C. Pantilimon
2
, C. Dragan
2
1- National Institute for Non-Ferrous and Rare Metals, 102 Biruintei Blvd., Pantelimon, Ilfov,
Romania,
2 - University POLITEHNICA of Bucharest, 313 Splaiul Independentei, 060042, Romania
In our days the advance of the coating technology increased significantly due to the need of the
aerospace, auto and optic industries. A high number of aircraft components is coated by metallic
and ceramic films in order to enhance their performances
.
[J. Singh, F. Quli, D. E. Wolfe, J. T.
Schriempf, J. Singh, An Overview: Electron Beam-Physical Vapor Deposition Technology- Present and
Future]
Materials based on perovskite nanostructured powders (Ba
0.75
Sr
0.25
TiO
3
and BaZrO
3
respectively)
were obtained by hydrothermal method starting from water soluble salts of Ba,Sr, Ti, Zr. KOH was
used as mineralizer. Working conditions were: pressure >100 barr and temperature was 200 °C.
The powders as – obtained were pressed in pellets (2 inch) and further sintered in the following
conditions: Ba
0.75
Sr
0.25
TiO
3
at 1200 °C in air, heating rate 5 °C/min; BaZrO
3
at 1600 °C in air,
heating rate 5 °C/min. EB-PVD deposition process was performed at pressure <10
-6
Torr, the
deposition rate was around 1 Å/sec. The films thickness was around 200 nm. The morphology, the
composition and the surface topography the films were analyzed by X-Ray Diffraction, Scanning
Electron Microscopy, and Atomic Force Microscopy.
Acknowledgements:
This work was supported by a grant of the Romanian National Authority for Scientific Research, CNDI–
UEFISCDI, project number 198/2012- SENSGAS UEFISCDI and the National Project PN 16200201. The
authors from National R&D Institute for Nonferrous and Rare Metals, Romania used the infrastructure
purchased in the frame of Structural Funds Project-HighPTMet (ctr.253/28.09.2010). This work has been
funded by the Sectoral Operational Programme “INCREASE OF ECONOMIC COMPETITIVENESS”, ID
1799/SMIS 48589/2015.
Figure 1. EB-PVD Installation -
Torr USA
(endowed with 5 guns
- 10 kW each, 3m
3
chamber
volume).
Figure 2
. Ba
0,75
Sr
0,25
TiO
3
thin
film deposition on Si/SiO
2
Figure 4.
BaZrO
3
thin film
deposition on Si/SiO
2
Figure 3.
Ba
0,75
Sr
0,25
TiO
3
thin film
deposition on glass
Figure 5
. BaZrO
3
thin film
deposition on glass
PS1 24
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