Growth and study of thermochromic VO
2
coatings using an APCVD system: a review
on the effect of the deposition parameters
D. Louloudakis
1,2*
, D. Vernardou
1
, E. Spanakis
3
, N. Katsarakis
1,4,5
, E. Koudoumas
1,4
and G.
Kiriakidis
2,5
1
Center of Materials Technology & Photonics, Technological Educational Institute of Crete,
710 04 Heraklion, Crete, Greece
2
Department of Physics, University of Crete 711 00 Heraklion, Crete, Greece
3
Department of Materials Science & Technology, University of Crete 711 00 Heraklion,
Crete, Greece
4
Department of Electrical Engineering, School of Engineering, Technological Educational
Institute of Crete, 710 04 Heraklion, Crete, Greece
5
Institute of Electronic Structure & Laser, Foundation for Research & Technology- Hellas,
P.O. Box 1527, Vassilika Vouton, 711 10 Heraklion, Crete, Greece
*corresponding author, e-mail
In recent years, metal to insulator transition materials have attracted a lot of interest because
of the large number of new technological applications that can be involved such as optical
switches, thermal relays, sensors, transistors, and thermochromic windows.
Regarding the thermochromic windows, vanadium dioxide coatings can change their optical
properties with temperature, an ability known as thermochromism, which makes them
promising candidates in smart windows.
In this work, vanadium dioxide coatings were fabricated using Chemical Vapor Deposition at
Atmospheric Pressure (APCVD) for various deposition parameters. The samples were
characterized by X-ray diffraction (XRD), Raman spectroscopy and Scanning Electron
Microscopy (SEM), while, their thermochromic response was investigated employing UV-
Vis-NIR spectroscopy measurements at temperatures below and above the transition
temperature as well as transmittance measurements as a function of temperature at an
incident radiation of 1500 nm.
A review on the influence of deposition parameters, such as precursor type, deposition
temperature, deposition time and oxygen flow rate through the reactor, on the phase of the
vanadium dioxide coatings and their subsequent thermochromic characteristics is presented.
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